Cleanroom
Coming soon
Samco PECVD
The Samco PECVD supports plasma-enhanced chemical vapor deposition for approved thin-film fabrication workflows.
Details
Use this tool for compatible PECVD film deposition processes where staff-approved recipes, materials, and substrates are available.
Typical uses
- Deposit compatible thin films
- Support microfabrication process stacks
- Develop approved deposition workflows
Access notes
Cleanroom access, process review, approved recipes, and tool-specific training are required before use.
This tool is coming soon and is not yet available for routine booking.
Cleanroom tools may require intake, orientation, training, approved process details, and booking through NEMO before use.