Cleanroom

Tergeo Plasma Cleaner

The Tergeo Plasma Cleaner supports surface cleaning, activation, and bonding workflows.

Tergeo plasma cleaner
Tergeo Plasma Cleaner Tergeo plasma cleaner for surface cleaning, activation, and bonding preparation.

Details

Use this tool for PDMS-glass bonding, surface activation, cleaning, and preparation before functionalization steps.

Typical uses

  • Activate surfaces for bonding
  • Clean compatible samples
  • Prepare surfaces for chemistry workflows

Access notes

Process settings and material compatibility should be confirmed before use.

Cleanroom tools may require intake, orientation, training, approved process details, and booking through NEMO before use.