Cleanroom
Olympus MX63 Microscope
The Olympus MX63 supports optical inspection and documentation of devices and materials.
Details
This microscope is useful for checking pattern quality, alignment, defects, surfaces, and device assembly outcomes.
Typical uses
- Inspect lithography and fabrication results
- Capture documentation images
- Review defects, alignment, and surface quality
Access notes
Users may need training depending on imaging mode and sample requirements.
Cleanroom tools may require intake, orientation, training, approved process details, and booking through NEMO before use.