Dektak XT
The Dektak XT provides contact profilometry for microscale height and surface measurements.
Details
This instrument is useful for validating etched depths, deposited film thicknesses, patterned structures, and surface profiles.
Typical uses
- Measure step heights and film thickness
- Inspect etched or patterned features
- Compare surface profiles across process conditions
Access notes
Sample geometry and surface condition should be reviewed before measurement.