Dektak XT

The Dektak XT provides contact profilometry for microscale height and surface measurements.

Dektak XT profilometer
Dektak XT Contact profilometer for measuring step height, surface profile, and film thickness.

Details

This instrument is useful for validating etched depths, deposited film thicknesses, patterned structures, and surface profiles.

Typical uses

  • Measure step heights and film thickness
  • Inspect etched or patterned features
  • Compare surface profiles across process conditions

Access notes

Sample geometry and surface condition should be reviewed before measurement.